Semiconductors are the foundation of the electronics industry. It is the main component to produce electronic chips, which are present in almost every electronic device serving modern human life, from personal devices to healthcare, defense, infrastructure, artificial intelligence etc. Did you know that industrial gases play an extremely important role in the semiconductor production process? Let’s find out with VSG Gas what types of gases are used to produce semiconductors and their uses through the article below.
1. The importance of semiconductors
Today, with modern life, it is not difficult for us to come across electronic devices that use semiconductor chips. Semiconductors are the basic components that make up small and microscopic chips in electronic components. It is present in almost every area of life. The closest thing to each of us is the smartphone, followed by household electronic devices such as televisions, refrigerators, microwaves… In addition, it is also present in medical and health care equipment. health, telecommunications equipment, high-tech military equipment, self-driving cars, data centers, artificial intelligence… It can be said that semiconductors play an important role, contributing to creating advances progress in the process of global scientific and technological development, making human life easier. They will power future technology and innovation that will allow us to do things we have never imagined.
Semiconductors play an important role in all areas of modern life
This is a huge industry with hundreds of billions of dollars in revenue. Since computer chips are an important input for many other high-tech industries, having a semiconductor manufacturing base in a country supports an entire ecosystem of high-value economic activity. Many countries around the world have identified this as a key industry and focused on investing in the semiconductor manufacturing industry.
2. Industrial gases play an important role in the production of semiconductors
Industrial gases are important components in the semiconductor manufacturing process. They help create the chemical reactions necessary to form the electrical properties of semiconductors. So, having a reliable supply of high purity gas is crucial for semiconductor manufacturing. The increasing demand for electronic chip production means the demand for high purity gas will increase along with it.
Industrial gases play an important role in the production of semiconductors
The manufacturing process of integrated circuits is complex and requires more than 30 different gases in all stages. Due to its complexity, the gases used need to be pure and precise at every stage of the manufacturing process to properly configure the semiconductor. Some of the core gases used include nitrogen, oxygen, argon hydrogen, Boron trichloride (BCL3) and Phosphine (PH3 ) which we will dive into to explain their role in the manufacturing process.
3. Some core gases for semiconductor production
Boron trichloride (BCL3)
Used as a corrosive agent in the semiconductor manufacturing process. The following are the uses of BCL3 in the electronics industry:
1. Silicon corrosion: to form delicate structures, such as transistor channels, wiring and other device features.
2. Patterning in semiconductor processing: silicon nitride layers are used to isolate or protect device areas..
3. Silicon nitride etching: used to etch silicon nitride materials, e.g. such as silicon nitride (Si3N4)
4. Used to etch metals, such as aluminum, copper and other metals, to form fine structures such as wires and electrodes.
The application of BCL3 as an etching agent in the electronics industry is very important, helping to create precise microstructures in the semiconductor manufacturing process, to form electronic component structures, from that builds high-performance integrated circuits and other electronic devices.
Phosphine (PH3 )
Is an important precursor compound used in the production of semiconductors and in the manufacture of microelectronic devices, usage is as follows:
1. Semiconductor production: used to form phosphate layer.
2. Photovoltaic materials: PH3 is also used as a raw material in the production of some solar cells to improve the performance and efficiency of solar cells.
3. Laboratory research: PH3 is used as a gas indicator and reducing agent in the laboratory.
The application of PH3 in semiconductor manufacturing involves complex reaction control and processing techniques to ensure the quality, uniformity and thickness of the deposited film, which plays a key role in fabrication of modern semiconductor devices because they can affect device performance, power consumption, and reliability.
Oxy
As you know, oxygen is an oxidizer, which is essential for causing deposition reactions. It is used to develop silicon oxide layers used for various elements in the process, such as diffusion masks. When using oxygen gas to produce semiconductors, the gas must be of extremely high purity to protect against any impurities that could be detrimental to the manufacturing process and device performance. During the etching process, oxygen is also used to remove any excess material debris created.
Finally, oxygen also helps neutralize reactive gases through oxidation reactions that can potentially alter the quality of the product. So, similar to nitrogen, oxygen also helps ensure that no pollution occurs.
Argon
Argon gas is used primarily in the deposition and etching processes in UV lithography lasers. It is used to create even the smallest patterns on semiconductor chips. During the production of silicon wafers, argon gas is used to protect the silicon crystals formed on the wafers from any potential reactions with oxygen and nitrogen during its growth in high temperature. Sometimes nitrogen can react to form metal nitrides. Because argon is also a very inert gas, it is used to provide a non-reactive medium for metal deposition by sputtering. Additionally, liquid argon is used with other tools to clean the smallest, most fragile chips.
Hidro
In photolithography, hydrogen is used to react with chemical tin, creating tin hydride. Tin hydride is needed to prevent buildup in expensive optical devices. Hydrogen is used in the deposition process for axial deposition of silicon and silicon germanium and also for surface preparation through an annealing process. It is used to create a new oxidation layer to modify an existing thin film. This process takes place in a high pressure and temperature environment, which means controlling flow rate, temperature and pressure is extremely important.
Additionally, hydrogen is also used in the doping stage to help control the decomposition process as the gas used for this process is extremely toxic. Diborane is also a chemical used in the doping process, but it will slowly decompose because it is thermally unstable and therefore requires hydrogen to help stabilize it.
4. Semiconductor industry in Vietnam
In Vietnam, the semiconductor industry is considered a foundation to support and promote the development of other industries, contributing to promoting economic development in depth. The Government has issued many policies and legal corridors to create conditions for prioritizing investment and development of high-tech products, in which the field of semiconductor chips is the top priority in all. aspects. Vietnam’s semiconductor industry grows at a compound annual growth rate (CAGR) of 19%, equivalent to about 6.16 billion USD between 2020 and 2024. The semiconductor sector is considered is a driving force for many industries and is one of nine high-value technology products in Vietnam.
Vietnam currently has 3 established national high-tech parks: Hoa Lac High-Tech Park (Hanoi), Da Nang High-Tech Park and City High-Tech Park. Ho Chi Minh City’s investment attraction activities are increasingly positive, creating a foundation for developing national scientific and technological potential. Many world-famous semiconductor chip companies have laid the foundation and invested heavily in this field such as Intel, Sonion, Applied Micro… and especially Samsung.
The semiconductor manufacturing industry in Vietnam is growing
This is a young industry in Vietnam. In the context of a sharp increase in demand for semiconductor equipment in recent years, Vietnam has many opportunities to exploit, master technology and commercialize profits from this highly profitable industry. With the potential of the semiconductor industry, there will be high demand for industrial gases in Vietnam.
